HE SERIES — SILICON THIN-FILM CAPACITIVE TECHNOLOGY
HE27 Vacuum/Absolute Pressure Sensor
The HE27 series employs silicon thin-film variable capacitance technology with a 316 stainless steel isolation diaphragm, specifically engineered for vacuum and absolute pressure measurement. It resolves common industry challenges including measurement instability, performance drift, and signal wandering in vacuum applications, covering ranges from -100 kPa to 3.5 MPa.
3.5 MPa
Max Range
±0.5%
Accuracy (FS)
≤4 ms
Response Time
IP67
Protection

Product Overview
The HE27 Vacuum/Absolute Pressure Sensor is purpose-built for applications where accurate vacuum and low absolute pressure measurement is critical. Utilizing proprietary silicon thin-film variable capacitance sensing technology with a 316L stainless steel isolation diaphragm, the HE27 overcomes the inherent limitations of conventional vacuum sensors — including measurement instability, sudden performance shifts, and long-term signal drift that plague piezoresistive designs in sub-atmospheric pressure ranges.
Available in both gauge and absolute pressure configurations, the HE27 covers an exceptionally wide range from -100 kPa (full vacuum) through 3.5 MPa positive pressure. The absolute pressure variants measure from 0 bar absolute, making them ideal for vacuum packaging, semiconductor processing, and pharmaceutical sterilization where true zero-reference measurement is essential. With ±0.5% FS typical accuracy, ≤4 ms response time, and long-term stability of ±0.2% FS, the sensor delivers reliable performance across demanding industrial environments.
The compact, all-stainless-steel construction provides inherent chemical resistance suitable for corrosive process media. Standard IP67 cable-type protection and CE certification enable deployment in harsh industrial settings, while multiple output options (4–20 mA, 0–5 V, 0.5–4.5 V) and thread connections ensure seamless integration with existing control infrastructure. With a proven durability rating exceeding 10 million pressure cycles, the HE27 delivers dependable vacuum measurement at an exceptional cost-performance ratio.
Technical Specifications
| Parameter | Specification |
|---|---|
| Measuring Range | -100 kPa to 0 (gauge) | 0 to 3.5 MPa (absolute) |
| Pressure Type | Gauge / Absolute |
| Overall Accuracy | Typical: ±0.5% FS | Max: ±1% FS (linearity, hysteresis, repeatability) |
| Long-Term Stability | Typical: ±0.2% FS/year | Max: ±0.3% FS/year |
| Overload Capacity | 1.5–2× FS (300% transient shock with damping) |
| Burst Pressure | 4× FS |
| Durability | > 10 million cycles (10–90% FS) |
| Resolution | 0.01% FS |
| Response Time | ≤ 4 ms |
| Output Signal | 4–20 mA (2-wire) | 1–5 V | 0–5 V | 0.5–4.5 V |
| Power Supply | 9–30 V DC (current output) | 12–30 V DC (voltage output) |
| Media Temperature | -20 to +85°C |
| Ambient Temperature | -20 to +80°C |
| Compensated Temperature | -10 to +60°C |
| Zero Temperature Drift | Typical: ±0.02% FS/°C | Max: ±0.05% FS/°C |
| Sensitivity Temp Drift | Typical: ±0.02% FS/°C | Max: ±0.05% FS/°C |
| Wetted Materials | 316L stainless steel diaphragm and body |
| Process Connection | M20×1.5 | G1/4 | 1/4NPT | Custom |
| Electrical Connection | Cable 1m | Hirschmann DIN 43650A | M12 right-angle 1m | M12 straight 1m |
| Protection Grade | IP65 (connector type) | IP67 (cable type) |
| Vibration Resistance | 10g (IEC 60068-2-6) |
| Shock Resistance | 100g / 1 ms (IEC 60068-2-27) |
| EMC | Emission: EN 61000-6-3 | Immunity: EN 61000-6-2 |
| Insulation Resistance | > 100 MΩ |
| Certification | CE (EU) |
| Measuring Medium | Gases and liquids compatible with 316 stainless steel |
Key Features
True Vacuum Measurement
Silicon thin-film variable capacitance technology provides stable, drift-free measurement from full vacuum (-100 kPa) through 3.5 MPa positive pressure — eliminating the instability and signal wandering common in piezoresistive vacuum sensors.
316L Stainless Steel Construction
The all-stainless-steel wetted path with isolation diaphragm ensures chemical compatibility with aggressive gases and liquids. No oil-fill or elastomer seals to degrade, delivering maintenance-free operation in corrosive environments.
Exceptional Overload Protection
Withstands 1.5–2× full scale continuous overload with 300% transient shock capability (with damping) and 4× FS burst pressure. This robust design protects the sensor in systems prone to vacuum surges and pressure spikes.
Fast 4 ms Response Time
Sub-5 ms response captures rapid vacuum changes in evacuation chambers, leak testing, and process cycling. Combined with 0.01% FS resolution, the HE27 detects even subtle pressure variations that slower sensors miss.
Ultra-Long Service Life
Rated for over 10 million pressure cycles at 10–90% FS, the capacitive sensing element shows virtually no fatigue degradation. Silicon thin-film construction eliminates the creep and drift issues that limit piezoresistive sensor lifespan.
Multiple Output & Connection Options
Available with 4–20 mA, 1–5 V, 0–5 V, or 0.5–4.5 V outputs. Standard 9–30 V DC power supply for current output and 12–30 V DC for voltage. Four process thread options (M20×1.5, G1/4, 1/4NPT, custom) and four electrical connector types.
Applications
Vacuum Packaging & Coating
Precise vacuum level monitoring in food packaging machines, vacuum metallizers, and thin-film coating systems. The ≤4 ms response time tracks rapid evacuation cycles while ±0.5% FS accuracy ensures consistent package integrity and coating quality.
Semiconductor & Electronics
Critical vacuum measurement in wafer fabrication, plasma etching, chemical vapor deposition (CVD), and clean room environments. The 316L stainless steel wetted path is compatible with process gases, and the absolute pressure reference eliminates barometric interference.
Pharmaceutical & Sterilization
Monitors vacuum levels in autoclave sterilizers, freeze-drying (lyophilization) equipment, and pharmaceutical packaging lines. CE certification and chemical-resistant construction meet strict hygiene and regulatory requirements in GMP-compliant facilities.
Industrial Process Control
General-purpose vacuum and pressure monitoring in manufacturing pipelines, reactors, and automated process lines. The wide -100 kPa to 3.5 MPa range handles both vacuum and positive pressure stages in a single sensor, simplifying system design.
Vacuum Pump Systems
Direct integration with rotary vane, scroll, and turbomolecular vacuum pump systems for real-time performance monitoring. The 10 million cycle durability rating ensures reliable long-term service despite continuous pressure cycling during pump operation.
Crystal Growth & Plasma Welding
Precise atmosphere control in Czochralski crystal growth furnaces and plasma welding stations. The fast response captures pressure transients during process transitions, while the absolute pressure measurement provides the stable reference these precision processes demand.
Ordering Guide
Use the model code system below to specify your HE27 configuration. Example: HE27 A 1R1B A1 F2 W3 — HE27, Absolute pressure, 0–1.1 bar, 4-20mA output, G1/4 thread, M12 right-angle connector.
| Selection Code | Options |
|---|---|
| Model | HE27 |
| Pressure Type | G = Gauge | A = Absolute |
| Range | 0F1B = -1 bar~0 (G) | F10B = 0~-1 bar (G) | ZF1B = -1~1 bar (G) | 001B = 1 bar (A) | 1R1B = 1.1 bar (A) | 002B = 2 bar (A) | 004B = 4 bar (A) | 010B = 10 bar (A) | 016B = 16 bar (A) | 025B = 25 bar (A) | 035B = 35 bar (A) |
| Output | A1 = 4-20mA | V1 = 1-5V | V2 = 0-5V | V3 = 0.5-4.5V | V4 = 0.5-4.5V/5V |
| Process Connection | F1 = M20×1.5 | F2 = G1/4 | F3 = 1/4NPT | F0 = Custom |
| Electrical Connection | W1 = Cable 1m | W2 = Hirschmann DIN 43650A | W3 = M12 right-angle 1m | W4 = M12 straight 1m |
| Special | T = Special requirements (specify in order notes) |
Note: Custom configurations are available for volume orders. Contact our sales engineering team for details.
Frequently Asked Questions
Need a Vacuum or Absolute Pressure Solution?
Whether you need precise vacuum monitoring for semiconductor processing, compound range measurement for autoclave systems, or a reliable absolute pressure sensor for industrial process control — our engineering team can help you select and configure the right HE27 variant for your specific requirements.
Our engineers typically respond within 12 business hours with detailed technical specifications and pricing.

