HE SERIES — SILICON THIN-FILM CAPACITIVE TECHNOLOGY

HE27 Vacuum/Absolute Pressure Sensor

The HE27 series employs silicon thin-film variable capacitance technology with a 316 stainless steel isolation diaphragm, specifically engineered for vacuum and absolute pressure measurement. It resolves common industry challenges including measurement instability, performance drift, and signal wandering in vacuum applications, covering ranges from -100 kPa to 3.5 MPa.

3.5 MPa

Max Range

±0.5%

Accuracy (FS)

≤4 ms

Response Time

IP67

Protection

HE27 Vacuum Absolute Pressure Sensor

Product Overview

The HE27 Vacuum/Absolute Pressure Sensor is purpose-built for applications where accurate vacuum and low absolute pressure measurement is critical. Utilizing proprietary silicon thin-film variable capacitance sensing technology with a 316L stainless steel isolation diaphragm, the HE27 overcomes the inherent limitations of conventional vacuum sensors — including measurement instability, sudden performance shifts, and long-term signal drift that plague piezoresistive designs in sub-atmospheric pressure ranges.

Available in both gauge and absolute pressure configurations, the HE27 covers an exceptionally wide range from -100 kPa (full vacuum) through 3.5 MPa positive pressure. The absolute pressure variants measure from 0 bar absolute, making them ideal for vacuum packaging, semiconductor processing, and pharmaceutical sterilization where true zero-reference measurement is essential. With ±0.5% FS typical accuracy, ≤4 ms response time, and long-term stability of ±0.2% FS, the sensor delivers reliable performance across demanding industrial environments.

The compact, all-stainless-steel construction provides inherent chemical resistance suitable for corrosive process media. Standard IP67 cable-type protection and CE certification enable deployment in harsh industrial settings, while multiple output options (4–20 mA, 0–5 V, 0.5–4.5 V) and thread connections ensure seamless integration with existing control infrastructure. With a proven durability rating exceeding 10 million pressure cycles, the HE27 delivers dependable vacuum measurement at an exceptional cost-performance ratio.

Technical Specifications

ParameterSpecification
Measuring Range-100 kPa to 0 (gauge) | 0 to 3.5 MPa (absolute)
Pressure TypeGauge / Absolute
Overall AccuracyTypical: ±0.5% FS | Max: ±1% FS (linearity, hysteresis, repeatability)
Long-Term StabilityTypical: ±0.2% FS/year | Max: ±0.3% FS/year
Overload Capacity1.5–2× FS (300% transient shock with damping)
Burst Pressure4× FS
Durability> 10 million cycles (10–90% FS)
Resolution0.01% FS
Response Time≤ 4 ms
Output Signal4–20 mA (2-wire) | 1–5 V | 0–5 V | 0.5–4.5 V
Power Supply9–30 V DC (current output) | 12–30 V DC (voltage output)
Media Temperature-20 to +85°C
Ambient Temperature-20 to +80°C
Compensated Temperature-10 to +60°C
Zero Temperature DriftTypical: ±0.02% FS/°C | Max: ±0.05% FS/°C
Sensitivity Temp DriftTypical: ±0.02% FS/°C | Max: ±0.05% FS/°C
Wetted Materials316L stainless steel diaphragm and body
Process ConnectionM20×1.5 | G1/4 | 1/4NPT | Custom
Electrical ConnectionCable 1m | Hirschmann DIN 43650A | M12 right-angle 1m | M12 straight 1m
Protection GradeIP65 (connector type) | IP67 (cable type)
Vibration Resistance10g (IEC 60068-2-6)
Shock Resistance100g / 1 ms (IEC 60068-2-27)
EMCEmission: EN 61000-6-3 | Immunity: EN 61000-6-2
Insulation Resistance> 100 MΩ
CertificationCE (EU)
Measuring MediumGases and liquids compatible with 316 stainless steel

Key Features

True Vacuum Measurement

Silicon thin-film variable capacitance technology provides stable, drift-free measurement from full vacuum (-100 kPa) through 3.5 MPa positive pressure — eliminating the instability and signal wandering common in piezoresistive vacuum sensors.

316L Stainless Steel Construction

The all-stainless-steel wetted path with isolation diaphragm ensures chemical compatibility with aggressive gases and liquids. No oil-fill or elastomer seals to degrade, delivering maintenance-free operation in corrosive environments.

Exceptional Overload Protection

Withstands 1.5–2× full scale continuous overload with 300% transient shock capability (with damping) and 4× FS burst pressure. This robust design protects the sensor in systems prone to vacuum surges and pressure spikes.

Fast 4 ms Response Time

Sub-5 ms response captures rapid vacuum changes in evacuation chambers, leak testing, and process cycling. Combined with 0.01% FS resolution, the HE27 detects even subtle pressure variations that slower sensors miss.

Ultra-Long Service Life

Rated for over 10 million pressure cycles at 10–90% FS, the capacitive sensing element shows virtually no fatigue degradation. Silicon thin-film construction eliminates the creep and drift issues that limit piezoresistive sensor lifespan.

Multiple Output & Connection Options

Available with 4–20 mA, 1–5 V, 0–5 V, or 0.5–4.5 V outputs. Standard 9–30 V DC power supply for current output and 12–30 V DC for voltage. Four process thread options (M20×1.5, G1/4, 1/4NPT, custom) and four electrical connector types.

Applications

Vacuum Packaging & Coating

Precise vacuum level monitoring in food packaging machines, vacuum metallizers, and thin-film coating systems. The ≤4 ms response time tracks rapid evacuation cycles while ±0.5% FS accuracy ensures consistent package integrity and coating quality.

Semiconductor & Electronics

Critical vacuum measurement in wafer fabrication, plasma etching, chemical vapor deposition (CVD), and clean room environments. The 316L stainless steel wetted path is compatible with process gases, and the absolute pressure reference eliminates barometric interference.

Pharmaceutical & Sterilization

Monitors vacuum levels in autoclave sterilizers, freeze-drying (lyophilization) equipment, and pharmaceutical packaging lines. CE certification and chemical-resistant construction meet strict hygiene and regulatory requirements in GMP-compliant facilities.

Industrial Process Control

General-purpose vacuum and pressure monitoring in manufacturing pipelines, reactors, and automated process lines. The wide -100 kPa to 3.5 MPa range handles both vacuum and positive pressure stages in a single sensor, simplifying system design.

Vacuum Pump Systems

Direct integration with rotary vane, scroll, and turbomolecular vacuum pump systems for real-time performance monitoring. The 10 million cycle durability rating ensures reliable long-term service despite continuous pressure cycling during pump operation.

Crystal Growth & Plasma Welding

Precise atmosphere control in Czochralski crystal growth furnaces and plasma welding stations. The fast response captures pressure transients during process transitions, while the absolute pressure measurement provides the stable reference these precision processes demand.

Ordering Guide

Use the model code system below to specify your HE27 configuration. Example: HE27 A 1R1B A1 F2 W3 — HE27, Absolute pressure, 0–1.1 bar, 4-20mA output, G1/4 thread, M12 right-angle connector.

Selection CodeOptions
ModelHE27
Pressure TypeG = Gauge | A = Absolute
Range0F1B = -1 bar~0 (G) | F10B = 0~-1 bar (G) | ZF1B = -1~1 bar (G) | 001B = 1 bar (A) | 1R1B = 1.1 bar (A) | 002B = 2 bar (A) | 004B = 4 bar (A) | 010B = 10 bar (A) | 016B = 16 bar (A) | 025B = 25 bar (A) | 035B = 35 bar (A)
OutputA1 = 4-20mA | V1 = 1-5V | V2 = 0-5V | V3 = 0.5-4.5V | V4 = 0.5-4.5V/5V
Process ConnectionF1 = M20×1.5 | F2 = G1/4 | F3 = 1/4NPT | F0 = Custom
Electrical ConnectionW1 = Cable 1m | W2 = Hirschmann DIN 43650A | W3 = M12 right-angle 1m | W4 = M12 straight 1m
SpecialT = Special requirements (specify in order notes)

Note: Custom configurations are available for volume orders. Contact our sales engineering team for details.

Frequently Asked Questions

Gauge pressure measures relative to atmospheric pressure (0 = ambient), while absolute pressure measures relative to a perfect vacuum (0 = complete vacuum). For vacuum applications like semiconductor processing or freeze-drying, absolute pressure is typically preferred because it provides a stable reference unaffected by weather and altitude changes. The HE27 gauge variants (G) cover -1 bar to 0 range for vacuum-relative measurement, while absolute variants (A) measure from 0 bar absolute up to 35 bar, giving true zero-reference readings essential for precise vacuum control.

Yes. The gauge-type HE27 with range code ZF1B covers -1 bar to +1 bar, allowing measurement of both vacuum (negative gauge) and positive pressure in a single sensor. This compound range is ideal for systems that cycle between vacuum and positive pressure stages, such as autoclave sterilizers and vacuum-pressure impregnation processes. For wider positive pressure ranges combined with vacuum, select the appropriate absolute pressure range variant.

For applications requiring full vacuum to atmospheric measurement, choose the 0F1B range (-1 bar to 0 gauge) or the 001B range (0–1 bar absolute). The 1R1B range (0–1.1 bar absolute) provides slight overpressure tolerance. For vacuum systems that also see positive pressure, the ZF1B compound range (-1 to +1 bar gauge) is ideal. For higher positive pressure requirements with vacuum capability, absolute ranges from 002B (2 bar) to 035B (35 bar) are available. Always select a range where your normal operating pressure falls within 20–80% of full scale for optimal accuracy.

Piezoresistive vacuum sensors suffer from three key issues: (1) measurement instability at sub-atmospheric pressures due to silicon strain gauge sensitivity to temperature gradients; (2) long-term zero drift that worsens at low pressures; (3) limited overload protection. The HE27’s silicon thin-film capacitive technology inherently avoids these problems — capacitive sensing is more stable at low pressures, shows minimal zero drift (±0.2% FS/year), and the robust stainless steel diaphragm provides 1.5–2× overload protection with 300% transient shock capability.

Standard HE27 configurations with common range and output combinations are typically available within 2–3 weeks. Custom configurations — including non-standard pressure ranges, special thread connections (F0 option), or modified output signals — are available for volume orders. Contact our engineering team with your specific requirements, quantities, and application details for a customized quotation.

Need a Vacuum or Absolute Pressure Solution?

Whether you need precise vacuum monitoring for semiconductor processing, compound range measurement for autoclave systems, or a reliable absolute pressure sensor for industrial process control — our engineering team can help you select and configure the right HE27 variant for your specific requirements.

Our engineers typically respond within 12 business hours with detailed technical specifications and pricing.